Process Engineer / Postdoctoral Fellow in silicon microfabrication
- Pattern preparation of DRIE hard mask using UV lithography and plasma process
- Development of new recipes and recipe optimization (profile, aspect ratio for different feature sizes) of DRIE with SPTS tool for high aspect ratio gratings at 4-inch wafer scale
- DRIE process scaling up to 8-inch wafer scale
- Inspection with optical microscope, profilometry and SEM
- Internal data report and presentations
Villigen / Argovie / Aargau / CH-5234 Villigen / Würenlingen